Experimental Capabilities

 

In Our Group

RHK UHV750 AFM/STM
Surface Science Apparatus
RHK 350 Environmental AFM/STM
Zygo NewView 6300 Interferometer
Bluewave Semiconductor HF-CVD Chamber
Quesant 250 AFM
Olympus BX51 Optical Microscope

On Campus

Singh Center for Nanotechnology
NBIC Probe Facility
Nanoscale Characterization Facility
Wolf Nanofabrication Facility (WNF)

Off Campus

Advanced Light Source
National Synchrotron Light Source
Synchrotron Radiation Center


RHK UHV750 AFM/STM

Description:

RHK UHV750 AFM/STM system attached to a surface science apparatus for in-situ characterization of surfaces. Can perform in both contact and non-contact AFM mode under UHV with our RHK SPM100 and PLLPro control electronics. Variable temperature stage allows for cooling to 30 K or heating to 1300 K. Mechanical noise is reduced using an with eddy current damping of the sample stage. The AFM head has also been adapted for thermal AFM probe use.

Location:

112 Towne
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Surface Science Apparatus

Description:

Surface science apparatus attached to a RHK UHV750 AFM/STM system for in-situcharacterization of surfaces. Has XPS, Auger, and LEED capabilities. Differentially pumped analyzer column allows for high pressure (100 mTorr) measurement. Temperature range between 100 K and 1000 K. Monochromated x-ray source for high resolution spectroscopy. Includes ion gun for charge compensation.

Location:

112 Towne
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RHK 350 Environmental AFM/STM

Description:

RHK 350 Environmental AFM/STM system. Vacuum capability down to ~10-6torr. Liquid nitrogen cooled to 100 K, heating stage up to 1300 K. High resolution allows imaging of atomic lattice spacing over 5×5 um scan sizes.

Location:

112D Towne
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Zygo NewView 6300 Interferometer

Description:

A scanning white light interferometer with sub-micron lateral resolution and single nanometer height resolution. Fast scanning allows for ~500 x 700 micron images to be taken in seconds. Includes 2.5x, 20x, and 50x external objectives as well as 0.5x, 1.0x, and 2.0x internal multipliers. The system also includes a green light source and function generator (+/- 10V) for use with the Dynamic Microelectromechanical Systems (DMEMS) option. This allows users to capture the time varying response of devices during steady state response. An amplifier (+/- 100V) is also included for devices requiring larger voltages.

Location:

112 Towne
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Bluewave Semiconductor HF-CVD Chamber

Description:

Hot filament chemical vapor deposition. Uses methane and hydrogen source gas and tungsten filaments. Capable of growing materials like nanocrystalline diamond, amorphous carbon, and carbon nanotubes. Cyclops 100 pyrometer used to measure both the filament and sample temperature. Optional programmable heating stage allows for substrate temperatures up to 800 C with thermocouple.

Location:

M36 Towne
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Quesant 250 AFM

Description:

Quesant 250 tabletop AFM. 20 um and 100 um scan heads with 2 um and 10 um z-ranges, respectively. Can accomodate large sample sizes. Additional N-point closed-loop linear motion stage with 100 um travel.

Location:

112C Towne
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Olympus BX51 Optical Microscope

Description:

Olympus BX51 optical microscope. 5x, 10x, 20x, 50x, and 100x objective lenses. Bright field, dark field, and differential imaging modes. Illumination in both transmission and reflection modes. Optional xenon lamp for fluorescence studies.

Location:

112C Towne
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